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Facile Phase Control of Multivalent Vanadium Oxide Thin Films (V2O5 and VO2) by Atomic Layer Deposition and Postdeposition Annealing

Facile Phase Control of Multivalent Vanadium Oxide Thin Films (V2O5 and VO2) by Atomic Layer Deposition and Postdeposition Annealing

저자

GY Song†, C Oh†, S Sinha, J Son, J Heo

저널 정보

출간연도

ACS Applied Materials & Interfaces 9, 23909-23917 (2017)