Home In-situ nitrogen plasma passivation of Al2O3/GaN interface states
저자
Junwoo Son, Varistha Chobpattana, Brian M McSkimming, Susanne Stemmer
저널 정보
Journal of Vacuum Science & Technology A
출간연도
2015/3/1
링크
https://avs.scitation.org/doi/10.1116/1.4905846
