Home In-situ nitrogen plasma passivation of Al2O3/GaN interface states
저자
J Son†, V Chobpattana, BM McSkimming, S Stemmer*
저널 정보
출간연도
Journal of Vacuum Science & Technology A 33, 020602 (2015)
링크
https://avs.scitation.org/doi/10.1116/1.4905846
